manufacture of microfluidic glass chips by deep plasma etching.pdf - PDFQueen - PDF Search engine. Free unlimited pdf search and download.

Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding. S. Queste • R. Salut • S. Clatot • J.-Y. ...

http://www.springerlink.com/index/xk82805638072174.pdf

manufacturer. We etched a pattern into the glass for a microfluidic system used for biological screening .... a hybrid passive microfluidic chip in Foturan™ glass and ... plasma step and annealing. A two-level device was also ...

http://www.springerlink.com/index/M1W6671R383V52P5.pdf

with the DRIE fabricated glass chips with the most delicate shaping of the nozzles. ..... etching and its microfluidic application Sensors Actuators. A 115 476–82 ... [17] Kolari K 2008 Deep plasma etching of glass with a silicon ...

http://www.iop.org/EJ/article/0960-1317/18/6/064010/jmm8_6_064010.pdf

fabrication of microfluidic devices. First, soft lithography was employed ... coated on a glass slide, in order to cut off wavelengths lower than 365 nm, ... in 'figure 4', where 100μm deep and 150 μm wide micro-channels are shown ... Plasma etching shows a promise as a competitive technology for on-chip production ...

http://www.iop.org/EJ/article/1742-6596/10/1/072/jpconf5_10_072.pdf

fabricated using lithography and plasma etching. This was integrated with a channel and used for ... 40p.m wide, 20 p:m deep and 2.5 cm long. One end of channel ... emitter glued to glass microfluidic chip microfabricated at ...

http://ieeexplore.ieee.org/iel5/7856/21629/01002265.pdf?arnumber=1002265

etching rate of glass was 75 nm/min. The patterned chips/wafers were cleaned with acetone and ethanol to remove resists. .... withstand long etching with BHF required for deep cavities. ..... Scientist in Advanced Manufacturing Reseach ...

http://ieeexplore.ieee.org/iel5/6040/34915/01667863.pdf

by T Ichiki - 2003 - Cited by 26

http://202.127.1.11/tsf/435/43511.pdf

by E Verpoorte - 2003 - Cited by 200

http://www.mtl.mit.edu/researchgroups/mems-salon/Hongwei_microfluidicMEMS.pdf

cal etching [4]. In conventional microfabrication technolo- gies, the sealing of glass channels ... gen plasma cleaner (Plasma Technology PLAB SE80 plasma cleaner) and oxidized for 1 min. ... were fabricated with a 50-µm-wide and 20-µm-deep. For elec- ... with the proposed methodology glass chips can be fabricated ...

http://www.lnls.br/ar2007/PDF/1128.pdf

by AE Cohen - Cited by 1

https://www2.lsdiv.harvard.edu/labs/cohen/Publications/CohenMoernerSPIESanDiego05_PrintedVersion.pdf

by K Kolari - Related articles

http://www.vtt.fi/inf/pdf/publications/2007/P670.pdf

by SLS Freire - 2008 - Cited by 7

http://www.chem.utoronto.ca/staff/WHEELER/Papers/parylene tips.pdf

6 Jul 2009 ... MANUFACTURE. Pattern developed out of the PR that was exposed. Dry or wet etching to remove the exposed ... Polymers can also be etched, but usually with plasma rather than wet-etched. ... Deep Reactive Ion Etching DRIE: Bosch process. Isotropic etching ... Making a simple glass microfluidic chip ...

http://laplace.us.es/cism09/Lecture 3 Handout.pdf

fabricate glass-based microfluidics.[7] New techniques, such as powder ... lithographical technique, ii) deep 3-D silicon master by inductively coupled plasma etching, and iii) replication master structured from nickel or other .... [19] showed that a microfluidic chip employing the electro- ...

http://www.informaworld.com/index/790766463.pdf

and Waferlevel Packaging, Chip and. Board Interconnection Technologies,. Si Technologies, 3D-Packaging and ... manufacturing the microfluidic compo- nents from silicon. .... Silicon deep etching (ASE process): Plasma etching of passivation layers ... Silicon and glass wafer with. 150 mm Ø (other sizes and materials ...

http://www.izm.fraunhofer.de/Images/maf_en_tcm357-84995.pdf

by S Tuomikoski - Cited by 3

http://lib.tkk.fi/Diss/2007/isbn9789512286072/isbn9789512286072.pdf

a PDMS-glass bonded Lab-on-a-chip device. Single cells can be trapped and studied within the ... between the main channel (20 µm deep) and three smaller .... under oxygen plasma the bonding between the PDMS and glass ... Etching of channels was done by. AMS Bosch etcher and the SEM images of the reservoir, ...

http://www.stw.nl/NR/rdonlyres/CA2F41DE-7DDF-46FF-928C-AE348ABCCE4E/0/mokkapati.pdf

by MBT MelvinKeywords: deep glass etching, masking technology, micro peristaltic pump. Category: 7 (Fluidic devices) ..... integration into glass microfluidic devices", Sensors and Actuators, B 89 (2003) 315-323 ... etching of Pyrex glass using SF6 plasma", Sensors ... of capillary electrophoresis chips with integrated ...

http://eprints.soton.ac.uk/41595/01/2654.pdf

by S Hediger - 1999 - Cited by 7

http://infoscience.epfl.ch/record/56010/files/28.pdf

by P Carazzetti - Cited by 4

http://infoscience.epfl.ch/record/116992/files/LMTS-CONF-2008-004.pdf

by D Kohlheyer - 2008 - Cited by 5

http://doc.utwente.nl/64854/1/Kohlheyer_-_A_microfluidic.....focusing_-_MicroNanofluidic_2008_4_557-564.pdf

by JY Cheng - 2005 - Cited by 27

http://ntur.lib.ntu.edu.tw/bitstream/246246/128124/1/62.pdf

by CF Chen - 2006 - Cited by 8

http://ntur.lib.ntu.edu.tw/bitstream/246246/106837/1/04.pdf

by JC Roulet - 2001 - Cited by 42

http://www.suss-microoptics.de/downloads/Publications/Fluorescence_Detection.pdf

by AV Pattekar - 2003 - Cited by 47

http://www2.parc.com/emdl/members/pattekar/docs/pattekar-kothare-jm3224.pdf

by J Chen - 2004 - Cited by 99

http://www.holochip.com/technology/pdf/LATechFluidLens.pdf

by D Erickson - 2004 - Cited by 242

http://www.mae.cornell.edu/Erickson/erickson_microfluidic_review.pdf

by DM Karnakis - Cited by 7

http://www.oxfordlasers.com/files/microfluidic.pdf

by IM Lazar - 2002 - Cited by 37

http://www.thaiscience.info/Article for ThaiScience/Article/2/Ts-2 microfluidic liquid chromatography system for proteomic applications and biomarker screening.pdf

by R Pantoja - 2004 - Cited by 72

http://nerve.bsd.uchicago.edu/FB/RIGO.pdf

by SW Rhee - Cited by 79

http://nljgroup.eng.uci.edu/Articles/sw loc 2004.pdf

500 µm long and 14 µm deep recess as a bead trap, but testing showed that a series of ... photolithographic techniques and etched using plasma etching. The channels were 54 µm deep and ... The glass side of the chip was placed on a CCD ...

http://www.nnin.org/doc/2005NNINreuNoderer.pdf

PCR device is a glass chip with a single capillary channel that repeatedly passes through three well-defined temperature ... deposition, plasma etching, chemical etching, ion-etching, .... Chips: Critical Elements of Future Integrated, Microfluidic ... manufacturing methods that are used to make microchips in ...

http://www.onepetro.org/google/Papers/SPE/eLibrary_Papers/spe/2001/01ATCE/00071451/00071451.pdf?id=00071451&soc=SPE

by S Queste - Cited by 1

http://www.4m-net.org/files/papers/4M2008/05-05/05-05.PDF

the plasma and the other blood components. Figure 1: Schematic view of the microfluidic device for ... A wet etching process in HF/HCl was used for 60µm deep-etching in glass (Figure ... Photo of the microfluidic chip for RBCs trapping ...

http://hal.archives-ouvertes.fr/docs/00/27/77/24/PDF/dtip08279.pdf

plasma process is also considered to be important in the future. In this paper, we present the fabrication of microfluidic devices using deep dry etching ...

http://www.apcpst.com/image/ppt/270.pdf

by R Davidsson - Cited by 1

http://www.lub.lu.se/luft/diss/sci_650/sci_650.pdf

dry metal etch, advanced oxide etching, and flip-chip bonding of ASIC and functional ... Furthermore, we are also interested in exploring R&D and manufacturing ... Figure 3.3 demonstrates a fully packaged microfluidic device (actually 5 parallel ... was fabricated by INEX using the ASE (Advanced Silicon Etch®) deep ...

http://bioinf.ncl.ac.uk/sbrc/talks/INEX Profile AMS 2006-06-20.pdf

by TT Kanagasabapathi - Cited by 2

http://www.nsti.org/publications/Nanotech/2004/pdf/B1-21.pdf

by R Konrad - 2002 - Cited by 125

http://www.nims.go.jp/mana/members/personal/m_pumera/publications/07.2002-EP-Pumera_PMMA.pdf

by MC Tracey - 2000 - Cited by 5

https://uhra.herts.ac.uk/dspace/bitstream/2299/1684/1/901856.pdf

by CJ Campbell - Cited by 40

http://www.complex-systems.northwestern.edu/publications/C_Campbell_1.pdf

by T Koerner - 2005 - Cited by 28

http://www.ntmdt.ru/data/media/files/publications/2005/02.01_terry_koerner_lauri_english.pdf

by Y SAROV - 2002 - Cited by 1

http://www.bjp-bg.com/papers/bjp2002_1-2_17-29.pdf

by P Lillehoj - Related articles

http://ho.seas.ucla.edu/publications/conference/2008/Lillehoj-IEEEMEMS-2008.pdf

by L Ceriotti - 2003 - Cited by 29

http://www.suss-microoptics.com/downloads/Publications/Lab-on-chip.pdf

devices are fabricated in silicon, glass, metal, plastic or elastomer and have many of ..... Plasma. • Reactive ion etching (RIE). • Deep reactive ion etching (DRIE). Deposition. • Epitaxy ... Cleanroom facilities for MEMS sensors manufacturing. Cleanrooms control .... microfluidic chips to operate in an unstressed ...

http://www.slb.com/media/services/resources/oilfieldreview/ors07/spr07/p60_68.pdf

etching of silicon and glass was a highly developed technology also readily available to researchers ... glass with plasma oxidation, which also makes channel surfaces .... The microfluidic channel measured 500 цm wide Q 400 цm deep, ..... glass chips to a heterogeneous competitive human serum immunoglobulin ...

http://humupd.oxfordjournals.org/cgi/reprint/9/5/451.pdf

by C Yu - 2001 - Cited by 73

http://www.bumems.ee.boun.edu.tr/publications/An_chem_valves.pdf

by CW Tsao - 2007 - Cited by 23

http://mml.umd.edu/mml/papers/Tsao_et_al_UV-Ozone_Bonding_2007.pdf